I n s i t u growth of superconducting YBa2Cu3O7−δ thin films on Si with conducting indium-tin-oxide buffer layers
- 10 September 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (11) , 1146-1148
- https://doi.org/10.1063/1.104221
Abstract
Superconducting YBa2Cu3O7−δ (YBCO) thin films have been grown in situ on Si with conducting indium‐tin‐oxide (ITO) buffer layers. ITO allows YBCO to be electrically connected to the underlying Si substrate. Both the YBCO film and ITO buffer layer, grown by ion beam sputtering, are textured and polycrystalline with a combined room‐ temperature resistivity of about 2 mΩ cm. Superconducting onsets are 92 K with zero resistance at 68 K.Keywords
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