A survey of techniques for the vacuum deposition of thin metallic films
- 1 December 1968
- Vol. 18 (12) , 651-654
- https://doi.org/10.1016/0042-207x(68)92262-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The Sputtering of Nickel–Chromium AlloysJournal of Vacuum Science and Technology, 1967
- Bias sputtering: its techniques and applicationsVacuum, 1967
- A long-life aluminium evaporation sourceJournal of Scientific Instruments, 1965