Bias sputtering: its techniques and applications
- 1 March 1967
- Vol. 17 (3) , 129-137
- https://doi.org/10.1016/0042-207x(67)93141-7
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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- Bombardment of Metals by Inert Gas IonsAustralian Journal of Physics, 1960