Reflection high‐energy electron diffraction study of growth and interface formation of the Ga1−xInxSb/InAs strained‐layer superlattices

Abstract
Growth and interface formation of the Ga1−xInxSb/InAs (x≤0.4) strained‐layer superlattices (SLSs) on GaSb(100) substrates have been studied by the reflection high‐energy electron diffraction (RHEED) during molecular beam epitaxy. A number of surface atomic structures were observed in the growth of the SLS: a (1×3) phases from the InAs epilayer surface; a (2×3) phase, a (2×4) phase and diffuse (1×1)‐like phases from the InAs epilayer surface. The RHEED intensity variations in the formation of the interfaces have been discussed in terms of interface chemical reactions.