Extensions of thermal grooving for arbitrary grain-boundary flux
- 15 September 1995
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 78 (6) , 3833-3838
- https://doi.org/10.1063/1.359898
Abstract
Groove profiles are computed under isotropic conditions for the intersection of a periodic array of grain boundaries with an external surface, assuming that grain boundary flux I is directed to (I≳0) or away from (I<0) the surface. When I=0, the surface assumes an equilibrium (time‐independent) profile. For I≠0, in a range bounded by upper and lower limits that depend on geometry and material parameters, a global steady‐state develops in which the entire surface advances (I≳0) or recedes (I<0) from its original position at constant velocity. Beyond these limits, the surface near the groove roots becomes diffusively detached from the remaining surface. A rapidly growing ridge (I≳0) or slit (I<0) then develops along each grain boundary, whose tip ultimately translates at constant velocity in a local steady state, leaving the remaining surface behind. These velocity regimes govern the ultimate stability of polycrystalline materials subjected to large electric (electromigration) or stress (creep) fields, especially in thin films where grain size approximates film thickness.This publication has 16 references indexed in Scilit:
- Stress Distribution and Mass Transport Along Grain Boundaries During Steady-State ElectromigrationMRS Proceedings, 1994
- The effect of stress on grain boundary groovingActa Metallurgica et Materialia, 1993
- Reliability Study of TiN/AlCu/TiN Interconnect in Submicron Cmos ProcessMRS Proceedings, 1993
- Instability of grain boundary grooves due to equilibrium grain boundary diffusionActa Metallurgica et Materialia, 1991
- A transmission electron microscopy study of hillocks in thin aluminum filmsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Voiding due to thermal stress in narrow conductor linesScripta Metallurgica, 1989
- The effects of grain size gradients on the stability of thin filmsScripta Metallurgica, 1988
- Overview no. 2: Non-equilibrium models for diffusive cavitation of grain interfacesActa Metallurgica, 1979
- The shape of intergranular creep cracks gro′ing by surface diffusionActa Metallurgica, 1973
- Interface morphology development during stress corrosion cracking: Part I. Via surface diffusionMetallurgical Transactions, 1972