Electron Microscope Study Of Microtwins In Epitaxial Silicon Films On Sapphire
- 1 January 1980
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 118 (1) , 89-95
- https://doi.org/10.1111/j.1365-2818.1980.tb00250.x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Sapphire Substrate Misorientation and SOS/MOS Transistor PerformanceJournal of the Electrochemical Society, 1977
- Cross-sectional electron microscopy of silicon on sapphireApplied Physics Letters, 1975
- The preparation and properties of chemically vapor deposited silicon on sapphire and spinelJournal of Crystal Growth, 1971
- Twinning in Silicon Epitaxially Deposited on SapphireJournal of Applied Physics, 1965