Infrared spectroscopy of hydrides on the 6H-SiC surface
- 9 June 1997
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 70 (23) , 3072-3074
- https://doi.org/10.1063/1.119094
Abstract
Hydrides on the 6H-SiC(0001̄) and (0001) surfaces before and after hydrogen annealing were investigated by infrared attenuated total reflection spectroscopy. The absorption bands of CH2 and CH3 were observed from the 6H-SiC(0001̄) and (0001) surfaces before hydrogen annealing. After hydrogen annealing, a sharp C–H stretching vibration attributable to a monohydride appeared on the 6H-SiC(0001̄) surface, in contrast to a sharp Si–H stretching vibration which can be observed on the 6H-SiC(0001) surface.Keywords
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