Abstract
The physical processes are explained for understanding of the EBIC‐method with direct irradiated schottky barriers, followed by description of preparation. The imagening of macroscopical inhomogeneities (striations, lifetime‐striae) is shown as an application in this Ist part. Finally contrasts are discussed, which are caused by preparation or by surface unevenness respectively, but not by inhomogeneities of the material.