SEM observation of dislocations in boron implanted silicon using schottky barrier EBIC technique
- 16 July 1978
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 48 (1) , K1-K4
- https://doi.org/10.1002/pssa.2210480137
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Schottky barriers on p-type siliconSolid-State Electronics, 1971
- Damage produced by ion mplantation in siliconRadiation Effects, 1970
- Copper Precipitation on Dislocations in SiliconJournal of Applied Physics, 1956