The effect of silica on the nitridation of silicon
- 1 January 1976
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 11 (1) , 195-198
- https://doi.org/10.1007/bf00541093
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Nitridation of high-purity siliconJournal of Materials Science, 1975
- Oxygen content of ?-Si3N4 single crystalsJournal of Materials Science, 1975
- Effect of oxide impurities on the nitridation of high purity siliconJournal of Materials Science, 1974
- Preparation of Si3N4 by Vapor‐Phase ReactionJournal of the American Ceramic Society, 1973