Effect of oxide impurities on the nitridation of high purity silicon
- 1 August 1974
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 9 (8) , 1363-1365
- https://doi.org/10.1007/bf00551855
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Deterioration of impermeable alumina tubes in inert atmospheres at elevated temperaturesJournal of Materials Science, 1973
- Effect of Oxygen Impurities on the Nitridation of High‐Purity SiliconJournal of the American Ceramic Society, 1973
- Ceramics based on the Si-Al-O-N and Related SystemsNature Physical Science, 1972
- The nitriding of silicon powder compactsJournal of Materials Science, 1972
- The strength and oxidation of reaction-sintered silicon nitrideJournal of Materials Science, 1970
- Impurity Deposits on Alumina CrystalsJournal of the American Ceramic Society, 1969