Oxidation of Chemically‐Vapor‐Deposited Silicon Nitride and Slnglem‐Crystal Silicon
- 1 July 1989
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 72 (7) , 1118-1123
- https://doi.org/10.1111/j.1151-2916.1989.tb09693.x
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- High-temperature oxidation of silicon nitride-based ceramics by water vapourJournal of Materials Science, 1987
- Oxidation of silicon by water and oxygen and diffusion in fused silicaThe Journal of Physical Chemistry, 1976
- Mass Spectrometric Analysis of Vapors in Oxidation of Si3N4 CompactsJournal of the American Ceramic Society, 1975
- REVIEWSForestry: An International Journal of Forest Research, 1972
- Conversion of silicon nitride into silicon dioxide through the influence of oxygenSolid-State Electronics, 1971
- Physical and Chemical Solubility of Nitrogen in Glass MeltsJournal of the American Ceramic Society, 1966
- Diffusion of Oxygen in Fused SilicaJournal of the American Ceramic Society, 1965
- The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and SteamJournal of the Electrochemical Society, 1963
- Diffusion of Oxygen in Vitreous SilicaJournal of the American Ceramic Society, 1963
- Water in silica glassTransactions of the Faraday Society, 1961