Effect of the nature of the working gas on the d.c. magnetron sputter deposition of chromium nitride and oxi-nitride thin films on steel substrates
- 31 March 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 80 (1-2) , 190-194
- https://doi.org/10.1016/0257-8972(95)02709-2
Abstract
No abstract availableKeywords
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