Formation and structure of ceramic thin films deposited by ion beam sputtering
- 1 September 1988
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 33-34, 567-577
- https://doi.org/10.1016/0169-4332(88)90354-6
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Preparation and structure of carbon film deposited by a mass-separated C+ ion beamJournal of Applied Physics, 1984
- Structural investigation of thin films of diamondlike carbonJournal of Applied Physics, 1981
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971