Pulse-periodical high-intensity ion sources for multielement implantation
- 1 January 1990
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (1) , 641-643
- https://doi.org/10.1063/1.1141945
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The Metal Vapor Vacuum ARC (MEVVA) High Current Ion SourceIEEE Transactions on Nuclear Science, 1985
- Characterization of amorphous surface layers in Fe implanted with Ti and CNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Repetitively pulsed metal ion beams for ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985