A nested electrostatically-actuated microvalve for an integrated microflow controller
- 17 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A dry-release method based on polymer columns for microstructure fabricationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A high-performance microflowmeter with built-in self testSensors and Actuators A: Physical, 1993
- Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theoryJournal of Microelectromechanical Systems, 1993
- An ultrasensitive silicon pressure-based microflow sensorIEEE Transactions on Electron Devices, 1992