Micro flow sensor and integrated magnetic oxygen sensor using it
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applicationsSensors and Actuators, 1987
- British Instrument Industries Exhibition - London, 1951Journal of Scientific Instruments, 1951