Abstract
Auger-electron spectroscopy, electron-energy-loss spectroscopy, and x-ray photoemission spectroscopy measurements have been used to study oxygen adsorption on InP(111)-(1×1) surfaces and the initial stage of oxidation. It has been observed that oxygen is adsorbed on both surface In and P atoms on InP(111)-(1×1) surfaces at an oxygen exposure of 104 L O2. (Here 1 L==106 Torr sec.) The mechanism of adsorption and oxidation is briefly discussed.