Dependence of activation energy of mass transport limited region on the photospectrum of photons participating in rapid photothermal assisted chemical vapor deposition
- 1 March 1998
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 27 (3) , L13-L16
- https://doi.org/10.1007/s11664-998-0206-0
Abstract
No abstract availableKeywords
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