-type-doping quantum wells and superlattices in Si: Self-consistent hole potentials and band structures
- 15 December 1998
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 58 (23) , 15675-15687
- https://doi.org/10.1103/physrevb.58.15675
Abstract
The hole-subband and -miniband structures of periodically acceptor -doped quantum wells and superlattices (SL’s) in silicon are calculated self-consistently within the effective-mass theory and the local-density approximation. The full six-band Luttinger-Kohn effective-mass equations are solved, together with Poisson equation, in a plane-wave representation. Nonparabolicities due to couplings between heavy, light, and spin-orbit split bands are fully taken into consideration. To account for exchange and correlation (XC) effects within the multicomponent hole gas, a parametrized expression for the XC potential energy is adopted. Hole band structures, Fermi levels, and potentials are presented for a series of p-type -doping SL’s, varying the acceptor doping concentrations, periods, and doping spreads. The inclusion of the spin-orbit split band is reflected essentially in nonparabolicities, and it starts to play an important role already for intermediate concentrations. For acceptor doping concentrations above the split-off band is populated for SL periods in both SL and isolated well regimes. A comparison with the available experimental data shows fairly good agreement. Particularly, the data reported on admittance and infrared spectroscopies can be reasonably interpreted if one assumes indirect transitions between subbands, as is the case in p-type -doped GaAs.
Keywords
This publication has 51 references indexed in Scilit:
- Hole band structure of p-type delta-doping quantum wells in siliconMicroelectronic Engineering, 1998
- Thomas-Fermi approximation in-type δ-doped quantum wells of GaAs and SiPhysical Review B, 1998
- Minibands of p-type δ-doping superlattices in GaAsSuperlattices and Microstructures, 1997
- Density Functional Theory for Holes in SemiconductorsPhysical Review Letters, 1997
- Electronic structure of delta-doped quantum well as a function of temperatureApplied Physics Letters, 1997
- Delta doping in siliconCritical Reviews in Solid State and Materials Sciences, 1993
- Secondary ion mass spectrometry depth profiling of boron, antimony, and germanium deltas in silicon and implications for profile deconvolutionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Quantized states in delta-doped Si layersSuperlattices and Microstructures, 1989
- Valence-Band Parameters in Cubic SemiconductorsPhysical Review B, 1971
- Effective Masses of Holes in SiliconPhysical Review B, 1954