Ion implant round robin
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 418-426
- https://doi.org/10.1016/0168-583x(85)90667-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Post-implant methods for characterizing the doping uniformity and dose accuracy of ion implantation equipmentNuclear Instruments and Methods in Physics Research, 1981