Selectively etched diffraction gratings in GaAs
- 15 August 1974
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 25 (4) , 208-210
- https://doi.org/10.1063/1.1655442
Abstract
Selective etching techniques are described which have been utilized to fabricate V‐groove diffraction gratings with spatial frequencies greater than 4000 lines/mm in {100} surfaces of GaAs.Keywords
This publication has 13 references indexed in Scilit:
- Liquid phase epitaxy of GaAlAs on GaAs substrates with fine surface corrugationsApplied Physics Letters, 1974
- Optically pumped GaAs waveguide lasers with a fundamental 0.11 μ corrugation feedbackOptics Communications, 1973
- A high efficiency thin grating coupler for integrated opticsOptics Communications, 1973
- Optically pumped GaAs surface laser with corrugation feedbackApplied Physics Letters, 1973
- Ion Beam Micromachining of Integrated Optics ComponentsApplied Optics, 1973
- Laser oscillation in leaky corrugated optical waveguidesApplied Physics Letters, 1973
- Passive-Core Corrugated-Waveguide LaserApplied Optics, 1973
- Selective Etching of Gallium Arsenide Crystals in H[sub 2]SO[sub 4]-H[sub 2]O[sub 2]-H[sub 2]O SystemJournal of the Electrochemical Society, 1971
- Preferential Etching and Etched Profile of GaAsJournal of the Electrochemical Society, 1971
- Spectrographic performance of holographically made diffraction gratingsOptics Communications, 1969