Improvement of isolation for MEMS capacitive switch via membrane planarization
- 19 October 2004
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 119 (1) , 206-213
- https://doi.org/10.1016/j.sna.2004.09.010
Abstract
No abstract availableKeywords
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- Microstructure of thermal hillocks on blanket Al thin filmsThin Solid Films, 2000
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