Stroboscopic Scanning Electron Microscopy at Gigahertz Frequencies

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Abstract
Techniques for achieving a microwave time resolving capability in a scanning electron microscope using the stroboscopic mode of operation are presented. By pulsing the primary electron beam with traveling wave electrostatic deflection plates, an over‐all system bandwidth in excess of 2 GHz is achieved. A method to detect fast primary electron beam pulses is also reported. Time varying surface potential measurements using secondary electron emission are given to demonstrate the microwave frequency response.