Characterization of ultrathin gate dielectrics by grazing X-ray reflectance and VUV spectroscopic ellipsometry on the same instrument
- 31 May 2002
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 303 (1) , 167-174
- https://doi.org/10.1016/s0022-3093(02)00980-8
Abstract
No abstract availableKeywords
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