Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy
- 25 March 2002
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 80 (12) , 2225-2227
- https://doi.org/10.1063/1.1464227
Abstract
A methodology is developed to enable wafer scale fabrication of single-walled carbon nanotube (SWNT) tips for atomic force microscopy. Catalyst selectively placed onto 375 prefabricated Si tips on a wafer is made possible by a simple patterning technique. Chemical vapor deposition on the wafer scale leads to the growth of SWNTs protruding from more than 90% of the Si tips. This represents an important step towards the scale up of nanotube probe tips for advanced nanoscale imaging of solid-state and soft biological systems and for scanning probe lithography.Keywords
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