Preparation and Evaluation of Direct Current Glow Discharge Plasma-Polymerized Films of Naphthalene and Octafluoronaphthalene

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Abstract
The plasma polymerization of naphthalene and octafluoronaphthalene using a DC glow discharge was performed. The prepared films were characterized by FT-IR and Raman spectroscopies, ESCA, ellipsometry, and contact angle measurements. The deposition rates of all of the plasma-polymerized films were high under general conditions (1-10 W). The applied voltage was found to strongly influence the structure of the deposited films. The ESCA profiles indicated that the deposited films were composed of a highly oxidized surface and a carbon-rich bulk region. This technique is also applicable to the preparation of hydrogen-free carbon films.