Processing of Thick Dielectric Films for Power MEMS: Stress and Fracture
- 1 January 2000
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Macro Power from Micro MachineryScience, 1997
- Mixed Mode Cracking in Layered MaterialsPublished by Elsevier ,1991