Hydrogen loss from laser-annealed amorphous hydrogenated carbon films studied by secondary-ion mass spectrometry
- 17 June 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (24) , 2758-2760
- https://doi.org/10.1063/1.104777
Abstract
Secondary-ion mass spectrometry was used to measure the amount of hydrogen retained in dense (ρ =2.4 g/cm3) amorphous hydrogenated carbon films subjected to Ar+ laser annealing in intensity range I=(1–6)×105 W/cm2. Hydrogen effusion, accelerating with laser power, is accompanied by a decrease of the film density and strengthening of the carbon skeleton that is interpreted as a transformation of the film from amorphous to a graphite-like state.Keywords
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