Quantitative analysis of titanium nitride by auger electron spectroscopy
- 31 December 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 193-194, 305-311
- https://doi.org/10.1016/s0040-6090(05)80039-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Quantitative AES and XPS investigation of magnetron sputtered TiNx filmsSurface and Interface Analysis, 1989
- Principal component analysis of Auger line shapes at solid—solid interfacesApplications of Surface Science, 1981