A conductance model (approach) for kinetic studies: The Ti–Ta–Si system
- 1 November 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 18 (6) , 2709-2714
- https://doi.org/10.1116/1.1319678
Abstract
Electrical resistance measurements provide a convenient way to study the kinetics of transformations in isothermally annealed thin films. The measured resistance and the amount of a new phase formed during some sort of reaction in a transformation process are often related by a linear function. This simple relationship between the measured resistance and the fraction of the new phase formed is not always valid and the reliability of the results might be questionable. In this communication, a different approach is suggested, which is based on conductance. The validity of the model is tested by experimental data for the Ti–Ta–Si system. The suggested and the linear resistance models are compared, and it seems that it is more appropriate in certain cases to use the conductance approach for kinetic purposes. An effective activation energy can be derived from the results by defining the time needed at each temperature to obtain either a constant resistance, or alternatively, a certain fraction of the new phase. The activation energy derived for the end phase, i. e. (Ti,Ta)Si2 formation from the experimental data in the example (Ti–Ta–Si) considered is ∼2.6 eV.Keywords
This publication has 17 references indexed in Scilit:
- Kinetic mechanisms of theC49-to-C54 polymorphic transformation in titanium disilicide thin films: A microstructure-scaled nucleation-mode transitionPhysical Review B, 1994
- The C49 to C54 Phase Transformation in TiSi2 Thin FilmsJournal of the Electrochemical Society, 1994
- Interfacial reactions between thin films of Ti–Ta and single crystalline SiJournal of Vacuum Science & Technology A, 1991
- Growth kinetics of titanium silicide during heating by RTA and furnace annealingApplied Surface Science, 1990
- Kinetics of titanium silicide formation on single-crystal Si: Experiment and modelingJournal of Applied Physics, 1988
- Growth and Structure of Ti and Ta Silicides Formed by Interfacial Reaction Between Ti-Ta Alloy Films and SiMRS Proceedings, 1988
- Silicide formation with codeposited titanium-tantalum alloys on siliconJournal of Applied Physics, 1987
- Effect of temperature on electrical and microstructural changes of coevaporated Ir-Si alloy filmsJournal of Applied Physics, 1986
- Growth and structure of titanium silicide phases formed by thin Ti films on Si crystalsJournal of Applied Physics, 1985
- Backscattering analysis of the successive layer structures of titanium silicidesThin Solid Films, 1979