Backscattering analysis of the successive layer structures of titanium silicides
- 17 December 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 64 (3) , 439-444
- https://doi.org/10.1016/0040-6090(79)90328-6
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- An analytical study of platinum silicide formationThin Solid Films, 1976
- Solid state reactions in titanium thin films on siliconThin Solid Films, 1976
- Silicide formation at low temperatures by metal-SiO2 interactionPhysica Status Solidi (a), 1973
- Principles and applications of ion beam techniques for the analysis of solids and thin filmsThin Solid Films, 1973
- Growth Kinetics Observed in the Formation of Metal Silicides on SiliconApplied Physics Letters, 1972