CHEMICAL STRUCTURE OF THE TRANSITIONAL REGION OF THE SiO2/Si INTERFACE
- 1 January 1978
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Experimental Observations of the Chemistry of the SiO2/Si InterfaceIEEE Transactions on Nuclear Science, 1977
- Low-energy ion-scattering spectrometry (ISS) of the SiO2/Si interfaceApplied Physics Letters, 1975
- Phase separation in silicon oxides as seen by Auger electron spectroscopyApplied Physics Letters, 1975
- Electron mean escape depths from x−ray photoelectron spectra of thermally oxidized silicon dioxide films on siliconJournal of Vacuum Science and Technology, 1975
- Noncrystalline silicon dioxide films on silicon: A reviewJournal of Non-Crystalline Solids, 1973