Single-crysytal silicon pressure sensors with 500 × overpressure protection
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 84-88
- https://doi.org/10.1016/0924-4247(90)85017-x
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Low-pressure sensors employing bossed diaphragms and precision etch-stoppingSensors and Actuators A: Physical, 1990
- Silicon microcavities fabricated with a new techniqueElectronics Letters, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982