Velocity and Orientation Dependence of Solute Trapping In Si
- 1 January 1980
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Surface accumulation of Te atoms in laser melted Te-implanted siliconJournal of Applied Physics, 1980
- Segregation and increased dopant solubility in Pt-implanted and laser-annealed Si layersApplied Physics Letters, 1980
- Supersaturated substitutional alloys formed by ion implantation and pulsed laser annealing of group-III and group-V dopants in siliconJournal of Applied Physics, 1980