Analysis of a micro-electric generator for microsystems
- 1 March 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 52 (1-3) , 8-11
- https://doi.org/10.1016/0924-4247(96)80118-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Performance of nonplanar silicon diaphragms under large deflectionsJournal of Microelectromechanical Systems, 1994
- Low cost miniature thermoelectric generatorElectronics Letters, 1991
- Electrically insulated smart sensors: Principles for operation and supplySensors and Actuators A: Physical, 1991