Performance of nonplanar silicon diaphragms under large deflections

This publication has 13 references indexed in Scilit:

• Effect of thermal oxidation on residual stress distribution through the thickness of p/sup +/ silicon films
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
• Behavior and application of silicon diaphragms with a boss and corrugations
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
• Internal stress compensation and scaling in ultrasensitive silicon pressure sensors
  IEEE Transactions on Electron Devices, 1992
• Large deflection performance of surface micromachined corrugated diaphragms
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1991
• Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
  Journal of the Electrochemical Society, 1990
• The fabrication and use of micromachined corrugated silicon diaphragms
  Sensors and Actuators A: Physical, 1990
• Scaling limitations of silicon multichannel recording probes
  IEEE Transactions on Biomedical Engineering, 1990
• Pressure sensor design and simulation using the CAEMENS-D
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1990
• Scaling limits in batch-fabricated silicon pressure sensors
  IEEE Transactions on Electron Devices, 1987
• Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped Silicon
  Journal of the Electrochemical Society, 1971