Fast turn characterization of SIMOX wafers

Publisher Website

4 December 2002

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 61-62
https://doi.org/10.1109/sossoi.1990.145710

Abstract

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Keywords

This publication has 2 references indexed in Scilit:

Physical characterization of low defect SIMOX materials
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
Nondestructive analysis of silicon-on-insulator wafers
Applied Physics Letters, 1987