Mechanical properties of r.f. magnetron sputtered indium tin oxide films
- 1 January 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 293 (1-2) , 244-250
- https://doi.org/10.1016/s0040-6090(96)09105-5
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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