Low-noise visible-blind UV avalanche photodiodes with edge terminated by 2° positive bevel
- 28 March 2002
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 38 (7) , 335-336
- https://doi.org/10.1049/el:20020216
Abstract
4H-SiC avalanche photodiodes edge terminated by a 2° positive bevel have been fabricated and characterised. Low leakage current, positive temperature dependence of breakdown voltage, high avalanche gain and very low noise have been achieved.Keywords
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