Growth of αRh2As on GaAs (001) in a molecular-beam epitaxy system
- 15 July 1988
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 64 (2) , 683-687
- https://doi.org/10.1063/1.341961
Abstract
Thin films of αRh2As were grown on top of GaAs (001) in a molecular‐beam epitaxy system by codeposition of rhodium and arsenic from separate sources. αRh2As is a good metal with a resistivity equal to 20 μΩ cm, suitable for electronic applications. The holes, the only type of carriers, have a concentration equal to 2.5×1022 cm−3, i.e., a value of the same order of magnitude as that of the best silicides. However, in spite of several features common to αRh2As and GaAs (symmetry, almost equivalent unit‐cell constant, and fcc As sublattices), the epitaxial arrangement [100](011)αRh2As//[110](001)GaAs mainly prevails instead of the expected simple unrotated relationship [100](001)αRh2As//[100](001)GaAs. This points out that the achievement of the minimum lattice mismatch is not always the driving force for the epitaxy. In agreement with the ternary phase diagram Rh‐Ga‐As, the (polycrystalline αRh2As)/GaAs system interacts above 400 °C and leads to the formation of the binary compounds RhGa and RhAs2.This publication has 20 references indexed in Scilit:
- Growth of RhGa on GaAs (001) in a molecular beam epitaxy systemApplied Physics Letters, 1988
- Epitaxial, thermodynamically stabilised metal/III-V compound semiconductor interface: NiGa on GaAs (001)Electronics Letters, 1987
- Interfacial reactions between Ni films and GaAsJournal of Applied Physics, 1986
- Structure and composition of NixGaAsApplied Physics Letters, 1986
- Initial stages of the Pd-GaAs reaction: Formation and decomposition of ternary phasesThin Solid Films, 1986
- Reactions of Pd on (100) and (110) GaAs surfacesJournal of Applied Physics, 1985
- AuGa2 on GaSb(001): An epitaxial, thermodynamically stabilized metal/III–V compound semiconductor interfaceJournal of Vacuum Science & Technology B, 1985
- Transistor effect in monolithic Si/CoSi 2 /Si epitaxial structuresElectronics Letters, 1984
- (Invited) Epitaxial Silicide Films for Integrated Circuits and Future DevicesJapanese Journal of Applied Physics, 1983
- Epitaxial silicidesThin Solid Films, 1982