Angular distributions of molecular flux from orifices of various thickness

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1 December 1985

journal article
Published by Elsevier in Vacuum

Vol. 35 (12) , 573-576
https://doi.org/10.1016/0042-207x(85)90317-3

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

How to place a Knudsen source to obtain optimal uniformity of film thickness on a spherical substrate holder
Vacuum, 1983
The approximate calculation of transmission probabilities for the conductance of tubulations in the molecular flow regime
Vacuum, 1978