Composition dependence of room temperature 1.54 μm Er3+ luminescence from erbium-doped silicon:oxygen thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition
- 2 March 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (9) , 1092-1094
- https://doi.org/10.1063/1.120974
Abstract
No abstract availableKeywords
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