H2S sensing properties of noble metal doped WO3 thin film sensor fabricated by micromachining
- 15 October 2001
- journal article
- Published by Elsevier
- Vol. 81 (2-3) , 237-247
- https://doi.org/10.1016/s0925-4005(01)00958-3
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- Influence of binders on the sensing and electrical characteristics of WO3-based gas sensorsSensors and Actuators B: Chemical, 1999
- WO3 thick-film gas sensorsSensors and Actuators B: Chemical, 1998
- Fabrication of a micro catalytic gas sensor using thin film process and Si anisotropic etching techniquesSensors and Actuators B: Chemical, 1997
- Highly sensitive and selective H2S gas sensor from r.f. sputtered SnO2 thin filmSensors and Actuators B: Chemical, 1995
- Hydrogen sulfide detection by nanocrystal PT doped TiO2-based gas sensorsNanostructured Materials, 1995
- H2S response of WO3 thin-film sensors manufactured by silicon processing technologySensors and Actuators B: Chemical, 1994
- Detection of sub-ppm H2S concentrations by means of SnO2(Pt) thin films, grown by the RGTO techniqueSensors and Actuators B: Chemical, 1993
- Stability, sensitivity and selectivity of tungsten trioxide films for sensing applicationsSensors and Actuators B: Chemical, 1993
- H2S monitoring as an air pollutant with silver-doped SnO2 thin-film sensorsSensors and Actuators B: Chemical, 1991
- The mechanism of operation of WO3-based H2S sensorsSensors and Actuators B: Chemical, 1990