Fabrication of a micro catalytic gas sensor using thin film process and Si anisotropic etching techniques
- 15 December 1997
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 45 (3) , 265-269
- https://doi.org/10.1016/s0925-4005(97)00322-5
Abstract
No abstract availableKeywords
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