The effects of surface roughness characterized by fractal geometry on sputtering
- 1 April 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 47 (2) , 118-125
- https://doi.org/10.1016/0168-583x(90)90019-q
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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