Terahertz time-domain spectroscopy of films fabricatedfrom SU-8
- 4 February 1999
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 35 (3) , 243-244
- https://doi.org/10.1049/el:19990146
Abstract
Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using the negative photoresist SU-8, in the frequency range 0.1–1.6 THz. At a frequency of 1 THz, the corresponding dielectric constant and dielectric loss tangent are 2.9 and 6.3 × 10–6, respectively.Keywords
This publication has 2 references indexed in Scilit:
- Fabrication technologies for terahertz waveguidePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- High frequency transmission line using micromachinedpolymer dielectricElectronics Letters, 1998