Wavelength-modulated photocapacitance spectroscopy

Abstract
Derivative deep‐level spectroscopy was achieved with wavelength‐modulated photocapacitance employing MOS structures and Schottky barriers. The energy position and photoionization characteristics of deep levels of melt‐grown GaAs and the Cr level in high‐resistivity GaAs were determined. The advantages of this method over existing methods for deep‐level spectroscopy are discussed.