The influence of surface topography on the electromechanical characteristics of parallel-plate MEMS capacitors
- 8 April 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (5) , 1068-1075
- https://doi.org/10.1088/0960-1317/15/5/025
Abstract
No abstract availableKeywords
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