Design, fabrication and characterization of single crystal silicon microactuator for hard disk drives
- 24 August 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 14 (12) , 1608-1613
- https://doi.org/10.1088/0960-1317/14/12/002
Abstract
No abstract availableKeywords
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- Design and fabrication of an angular microactuator for magnetic disk drivesJournal of Microelectromechanical Systems, 1998
- Analysis of the Dynamics of a Type 4 SuspensionJournal of Vibration and Acoustics, 1992